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Mikrosensorik HCL

Mikrosensorik HCL

Adding HCl led at 500 &C, 20 Torr to a significant decrease (from 7.8 down to 4.2 nm.min-1) of the growth rate, together with a significant Ge concentration increase (from 35 % up to 55 %). Finally, we have investigated the 500 &C, 20 Torr growth of heavily in-situ boron …

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